Abstract
In an electro statically actuated nanoelectromechanical system (NEMS) resonator, it is shown that both the resonance frequency and the resonance quality (Q) factor can be manipulated. How much the frequency and quality factor can be tuned by excitation voltage and resistance on a doubly—clamped beam resonator is addressed. A mathematical model for investigating the tuning effects is presented. All results are shown based on the feasible dimension of the nano resonator and appropriate external driving voltage, yielding up to 20 MHz resonance frequency. Such parameter tuning could prove to be a very convenient scheme to actively control the response of NEMS for a variety of applications.
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