Abstract
In order to establish an indium content of more than 30% in pseudomorphic Al x Ga 1- x As⧸In y Ga 1- y As HFET, a highly strained In y Ga 1- y As/GaAs graded superlattice as active channel is introduced. The superlattice is designed to utilize a thin layer of of In 0.4Ga 0.6As at the location of the maximum probability density of electrons. Smoothing of the In y Ga 1- y As surface is provided by the overgrowth of GaAs monolayers as demonstrated by RHEED intensity oscillations. The quality of the superlattice channel is confirmed by high resolution STEM analysis. Optimization of MBE growth parameters, transport properties and device performance is reported.
Published Version
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