Abstract
The RHEED intensity oscillation during synthesis of magnesium oxide/titanium oxide ceramic superlattice thin films was studied. The enhancement of the RHEED intensity brought about by the deposition of magnesium oxide was attributed to the efficient migration of magnesium oxide on to high energy sites (e.g., the bottom of a ravine between islands) of a surface of titanium oxide layer. The migration and the crystallization of titanium oxide which occurred during annealing in vacuum were confirmed by RHEED and AFM. Nevertheless, the flatness of the surface was inferior to that of magnesium oxides. RHEED intensity oscillation was observed while magnesium oxide was deposited on titanium oxide at 419°C. The oscillation period was about 0.2 nm corresponding to half of the lattice constant of magnesium oxide.
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