Abstract

Reflection high-energy electron diffraction (RHEED) with total-reflection-angle X-ray spectroscopy (TRAXS) has been applied to the chemical and structure analysis during preparation of YB/sub 2/Cu/sub 3/O/sub 7-x/ (YBCO) films. The characteristic X-rays of YL alpha , BaL alpha , and CuK alpha emitted even from 0.8-AA-thick YBCO were clearly observed by TRAXS. In addition, the surface sensitivity of this method was found to be comparable to or higher than that of Auger electron spectroscopy. From the RHEED observation, it was revealed that the lattice spacing drastically changes from 4.09 AA to 3.8 AA at a mean thickness of less than one unit cell of YBCO at the early growth stage.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>

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