Abstract
In detecting X-rays excited in RHEED (reflection high energy electron diffraction) experiments [1,2], when the X-ray take off angle is set to be the critical angle for total reflection of the characteristic X-ray emitted from deposited atoms on a surface, the detection efficiency for the deposit was found to become drastically higher owing to the refraction and absorption effects of the X-ray [3]. We called this method RHEED-TRAXS (total reflection angle X-ray spectroscopy).
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