Abstract
In this Letter, we use the nanoindentation technique and vary the testing temperature to above and below critical values to study the nanomechanical features of a strong Pb-free piezoelectric Ba(Zr0.2Ti0.8)O3-0.5(Ba0.7Ca0.3)TiO3 (BZT-0.5BCT) thin film across its piezoelectric-optimal morphotropic phase boundary. The mechanisms responsible for the Young's modulus and hardness evolution are then discussed. An X-ray diffraction method that can detect the d(110) variation associated with the change in the inclination angle ψ of the (110) plane was developed to quantify the residual stress in the BZT-0.5BCT films.
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