Abstract
In situ measurement of internal stress distribution in Fe/Al multilayered films was made by detecting the curvature of substrates during deposition. When the Al layer was deposited on the Fe layer, a large curvature of the substrate corresponding to the compressive stress in the films was detected. On the other hand, tensile stress appeared when the Fe layer was deposited on the Al layer, and the internal stress became compressive stress after the thickness of Fe layer exceed 10 AA. Mica sheets with thickness of 0.02 mm and a He-Ne laser were used as substrates and light source, respectively, in order to detect the curvature of the substrates during deposition of the Fe/Al multilayered films.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
Published Version
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