Abstract
We report optical nanostructuring technology, developed for distributed feedback gratings, broadly useable for many applications. The nanostructure is pre-structured into aluminum-free layers on top of AlGaAs then etched inside the epitaxy reactor and overgrown with AlGaAs. Oxygen contamination at the grating-interface is ∼3 × 1011 cm−2. These gratings introduce no extra internal optical loss and series resistance in broad-area lasers. Distributed feedback broad-area lasers using this technology achieve optical power >12 W, peak efficiency >60%, wide spectral locking range in current and heatsink temperature (over at least ∼30 °C) and operate at 10 W for >5000 h in a preliminary reliability test.
Published Version
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