Abstract

Fe has been studied in the semiconductors Si and Ge with the Coulomb excitation recoil implantation technique in a wide temperature range. In the case of Fe inSilicon it was found that one third of the implanted atoms land on interstitial sites. The long range diffusion of these atoms could be observed microscopically at temperatures around 600 K. The isomer shift of interstitial Fe in Si was determined. The remaining atoms exhibit a strong quadrupole splitting on disturbed sites. This component seems to relax into a state with higher symmetry above 700 K. InGermanium a similar situation is found. Whereas iron on disturbed sites dominates the spectra, the direct implantation into interstitial sites is also observed below 200 K. At higher temperatures the substitutional position is preferred. The isomer shifts for interstitial and substitutional Fe in Si and in Ge are in good agreement with calculated electron densities.

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