Abstract
It has been previously reported that the remnant polarization of 0.65Pb(Mg 1/3Nb 2/3)O 3–0.35PbTiO 3 (PMNT) thin films on Si-based substrates is much lower than that of bulk ceramics with the same composition, which is a problem for its integration in microdevices. The preparation of multilayer composites of PMNT and PbTiO 3 layers, which maintain large remnant polarization values even for the thinnest films, is explored in this work as an alternative for obtaining PMNT-based films with enhanced remanence. The multilayer composite thin films were fabricated onto Pt/TiO 2/SiO 2/Si (100) substrates by Chemical Solution Deposition. The deposited layers are ultrathin and the results show that there is no significant interdiffusion among them. Although the typical constraints related to the small grain size found in ultrathin layers and the associated lack of ferroelastic domains are present, the results show an improvement of the remanence of the PMNT layer in the multilayer composite film and that these composites can be good candidates for the integration of PMNT in devices.
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