Abstract
Pt collector and LiCoO2 cathode films were deposited onto trench-SiO2/Si substrates by liquid-delivery metalorganic chemical vapor deposition (LDMOCVD). The 100-nm-thick Pt thin films deposited at 350 °C showed the lowest resistivity and roughness and step-coverage of 57% in trench structure (aspect ratio-1). The LiCoO2 cathode films (step-coverage=51%) deposited onto a Pt collector showed an increase of approximately two and half times the discharge capacity compared with those of planar-cathode films. The LDMOCVD process is suitable to improve the discharge capacity of LiCoO2 cathode films using a trench structure in lithium rechargeable batteries.
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