Abstract
We have evaluated a change in optical modulation of Mach–Zehnder interferometers (MZIs) after bias temperature (BT) stress. Phase shifters of MZIs are made of (Ba,Sr)TiO3 (BST) films, which are sputter-deposited at 450 °C, which is an acceptable temperature after the metallization process. As a result, the optical modulation of MZIs is enhanced by BT stress. This effect is regarded as an “optical imprint effect” because this effect is similar to the imprint effect of polarization properties of ferroelectric materials by BT stress. It is found that the optical imprint effect of BST MZIs becomes maximum when the temperature of BT stress is 75 °C. The reason for this phenomenon is considered to be the lowering of the resistivity of the BST layer when stress temperature is higher than 75 °C. The imprint effect decreases with time after removing the bias stress, and the decay speed in the imprint effect increases with substrate temperature. We propose a model of the optical imprint effect in which the polarized domains are aligned by BT stress, and then the electro-optic (EO) effect is enhanced.
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