Abstract
Shielded coplanar waveguides are promising candidates for the development of high quality factor transmission lines in millimeter-wave frequency bands. In this article, state-of-the-art experimental results carried out on a CMOS 0.35 μm low-cost technology are presented. This letter especially deals with the benchmark of slow-wave transmission lines in focusing on the impact of technology dispersion on the measurement results. Eight dies have been measured, each from a different wafer, showing a robust design versus the technology. These results open new possibilities for the development of miniaturized low-loss compact passive devices. © 2010 Wiley Periodicals, Inc. Microwave Opt Technol Lett 52:2786–2789, 2010; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.25598
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