Abstract

A hybrid modeling network, consisting of several Monte Carlo and fluid models, is developed for a hollow cathode glow discharge in a mixture of helium and argon, with copper as the cathode material. The species considered in the models are the helium and argon gas atoms, electrons, He+, He2+, Ar+, and Ar2+ ions, He and Ar metastable atoms, fast He and Ar atoms, and sputtered Cu atoms and Cu+ ions. The modeling network is applied to typical laser conditions. The results of the model, presented in this article, include the electric potential distribution, the density profiles of the various plasma species, and the relative contributions of the various production and loss mechanisms for the plasma species. The model gives us more insight into the plasma behavior, and is therefore useful for optimization of the discharge efficiency for laser applications.

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