Role of the fast Ar atoms, Ar+ ions, and metastable Ar atoms in a hollow cathode glow discharge: Study by a hybrid model

Abstract

The role of the fast Ar atoms, Ar+ ions, and metastable Ar atoms in a cylindrical hollow cathode discharge (HCD) is studied based on a self-consistent model. The model comprises submodels based on the principle of Monte Carlo and fluid simulations. With Monte Carlo models the movement of the fast electrons, fast Ar atoms, and fast Ar+ ions as particles is described, while with the fluid models, the slow electrons, ions, and metastable atoms are treated as a continuum. Typical results are, among others, the fast atom, fast ion, and fast electron excitation and ionization rates, the electron, ion, and metastable atom densities and fluxes, the energy distribution function of the fast atoms, fast ions, and fast electrons, and the electric field and potential distribution. Also the relative importance of different processes determining the metastable density in an Ar HCD is analyzed, as well as the influence of the fast atoms and fast ions on the discharge properties.