Abstract
IrO 2-TiO 2 thin films were prepared by atomic layer deposition using Ir(EtCp)(COD) and titanium isopropoxide (TTIP). The resistivity of IrO 2-TiO 2 thin films can be easily controlled from 1 500 to 356.7 μωcm by the IrO 2 intermixing ratio from 0.55 to 0.78 in the IrO 2-TiO 2 thin films. The low temperature coefficient of resistance(TCR) values can be obtained by adopting IrO 2-TiO 2 composite thin films. Moreover, the change in the resistivity of IrO 2-TiO 2 thin films was below 10% even after O 2 annealing process at 600 °C. The step stress test results show that IrO 2-TiO 2 films have better characteristics than conventional TaN 0.8 heater resistor. Therefore, IrO 2-TiO 2 composite thin films can be used as a heater resistor material in thermal inkjet printhead.
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