Holographic fiducial marks: A system for precise alignment of x-ray optics

Abstract

This Letter covers the design and implementation of a generalizable system for the precise alignment of X-ray gratings. Next-generation high-energy grating-based Differential Phase Contrast (gDPC) X-ray imaging systems require precise alignment of the X-ray gratings as low as 1 mrad in rotation and 0.5 mm in translation. In this work, we designed holographic fiducial marks, consisting of four reflective Fresnel zone plates, each placed in a separate quadrant of the mark. When illuminated with a collimated laser beam, each mark creates a predefined pattern of four points, which changes quantitatively for any misalignment in each of the three translational and three rotational degrees of freedom. We fabricated the designed fiducial marks using photolithography and etching processes. The experimental system is implemented using a HeNe laser and an optical imaging system, which includes a beam expander, a plate beam splitter, and a CMOS camera, suitable for aligning practical gratings in gDPC X-ray imaging systems. Our experimental results demonstrate the rotational precision capabilities of the reported alignment system down to 0.42 mrad around the optical axis and 0.03 mrad around the axes perpendicular to the optical axis. The translational precision of 83.64 μm along the optical axis and 1.22 μm along the axes perpendicular to the optical axis is also demonstrated.