Abstract
An electron gun with a hollow cathode was tuned to be used in electron beam annealing. Electron beams with an energy of 1 keV and a current of 100 mA were obtained. It is shown that the diameter of the electron beam varies in the range from 7 to 5 mm, while the specific power is from 2·105 to 2·104 W/m2. Such electron beams have a soft, non-destructive effect on the surface and are suitable for electron beam annealing of various films.
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