Abstract
We have investigated the effect of anneal time on the performance and temperature-dependent stability of low-temperature-fabricated (180°C) hydrogenated amorphous silicon (a-Si:H) thin-film transistors (TFTs) on flexible substrates. For TFTs annealed for 48 h, the subthreshold slope and off-current were reduced by a factor of ~3 and by two orders of magnitude, respectively, when compared to unannealed TFTs. Furthermore, longer annealed TFTs showed a significant improvement in their stability when compared to unannealed TFTs. The lifetime values for the 48- and 96-h-annealed TFTs improved by a factor of ~3 compared to unannealed TFTs when the threshold voltage shift is extrapolated to 10 V. Stability at high temperatures with better lifetimes for the longer annealed TFTs is due to improvement in the a-Si:H/SiN <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</i> interface quality by the reduction of trapped charges inside the insulator. For all the TFTs at a positive gate bias, ΔV <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</sub> follows a power law dependence with time, indicating state creation. A low β value (0.6 for unannealed TFTs to 0.37 for 96-h-annealed TFTs) indicates a good-quality a-Si:H channel and/or the a-Si:H/insulator interface after longer anneals.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
