Abstract
The miniature fiber optic Fabry-Perot pressure sensor with a silicon diaphragm was developed for medical applications. The configuration of this sensor was a 1-mm long fiber optic Fabry-Perot interferometer bonded to an 80 micrometers -thick diaphragm. The length of the sensor was about 1.5 mm and the area of the diaphragm was 1 mm x 1 mm. The phase shift of the interferometric sensor was proportional to the applied pressure. The relationship between the applied pressure and the phase change was nonlinear.
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