Abstract
Fibre optic Fabry-Perot interferometric pressure sensors have proved many orders of excellent measurements system, but they suffer from limitations in sensitivity and resolution caused by the trade-off in designing the sensor when very thin diaphragm is needed. By reducing the diaphragm thickness increases the deflection range, but reduces the diaphragm strength and therefore increases the risk of mechanical failure. The pressure sensor has been designed and its fabrication process using MEMS techniques is explained. This paper proposes a new diaphragm material for the fibre optic Fabry-Perot pressure sensor. Using a Polydimethylsiloxane (PDMS), the limitation on sensor resolution and sensitivity are overcome. The goal of this research is to design and analyze the PDMS diaphragm to enhance the consistency and sustainability of fibre optic Fabry-Perot pressure sensor for medical measurements which require a minimum resolution of ~1 mmHg over all the physiological pressure range (~300 mmHg). Comparisons of theoretical and simulation with Coventor Ware simulator on mechanical part of the pressure sensor are made. Also, an explanation viewing the sensor's diaphragm stability is provided.
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