Year-end Sale % OFF 
Abstract
The high-performance fiber optic Fabry-Perot pressure sensor with a Si3N4/SiO2/Si3N4 (N/O/N) diaphragm fabricated using micromachining technology in anisotropic etchant KOH solution was developed. The configuration of this sensor was a 2-cm-long fiber optic Fabry-Perot interferometer bonded to a 0.6-µm-thick diaphragm. When the area of the N/O/N diaphragm used in the experiments was 2×2 mm2, the pressure sensitivity was 0.11 radian/kPa, and when the area was 8×8 mm2, the pressure sensitivity was 1.57 radian/kPa. The relationship between the applied pressure and the phase change was linear.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
