Abstract
The high-performance fiber optic Fabry-Perot pressure sensor with a Si3N4/SiO2/Si3N4 (N/O/N) diaphragm fabricated using micromachining technology in anisotropic etchant KOH solution was developed. The configuration of this sensor was a 2-cm-long fiber optic Fabry-Perot interferometer bonded to a 0.6-µm-thick diaphragm. When the area of the N/O/N diaphragm used in the experiments was 2×2 mm2, the pressure sensitivity was 0.11 radian/kPa, and when the area was 8×8 mm2, the pressure sensitivity was 1.57 radian/kPa. The relationship between the applied pressure and the phase change was linear.
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