Abstract
We report the achievement of flexible oxide thin-film transistors (TFTs) that are highly robust under mechanical bending stress. Fabricated on solution-processed polyimide, the oxide TFTs employ the dual-gate structure with an amorphous-indium-gallium-zinc oxide (a-IGZO) semiconductor, silicon dioxide gate insulators, and molybdenum gate and source/drain electrodes. High mechanical stability is achieved by shorting the two gates together to induce bulk accumulation (BA)—a condition in which the channel accumulation layer of electrons extends the entire depth of the active layer. It is shown experimentally that the BA a-IGZO TFTs exhibit better stability under bending stress compared with single gate-driven TFTs. From TCAD simulations, the immunity to slight variations in carrier concentration under tensile strain is found to be a result of the high gate-drive intrinsic of the BA TFTs.
Published Version
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