Abstract
The results of the investigation of the reflective characteristics of multilayer mirrors based on Ru/Y are presented. Reflection coefficients at the level of 38.5% at an operating wavelength of 9.4 nm. It is shown that the deposition of B4C barrier layers onto Y layers makes it possible to significantly increase the reflection coefficient compared to structures without barrier layers. A reflectance of 54% was obtained for mirrors optimized for 11.4 nm, which is close to the theoretical limit for these materials.
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