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Abstract
In this paper, in order to improve the TCF the propagation characteristics of SiO 2 /Rotated Y-cut, X-propagating LiNbO 3 leaky SAW substrates with a large electromechanical coupling coefficient (k 2 ) and zero temperature coefficient of frequency (TCF) are theoretically investigated. The results showed a large k 2 of leaky SAW over 0.2 (zero k 2 of Rayleigh mode), zero TCF and zero propagation attenuation in the case of metallized surface at thin film thickness of H/ u =0.15∼0.25(H: SiO 2 film thickness, u :SAW wave-length) were obtained. The experimental results agreeded to the theotetical ones.
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