Abstract

In this study, in order to improve the temperature coefficient of frequency (TCF), the propagation characteristics of SiO/sub 2//rotated Y-cut, X-propagating LiNbO/sub 3/ leaky surface acoustic wave (SAW) substrates with a large electromechanical coupling coefficient (k/sup 2/), zero attenuation and zero TCF are theoretically investigated. The results showed a large k/sup 2/ of more than 0.2 (zero k/sup 2/ of Rayleigh mode), zero TCF and zero propagation attenuation for leaky SAW in the case of a short boundary at a thin film thickness of H//spl lambda/=0.15/spl sim/0.22 (H=SiO/sub 2/ film thickness, /spl lambda/=SAW wavelength). The experimental results agreed with the theoretical ones.

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