Abstract
Abstract A high-temperature furnace was constructed to perform in situ Grazing-Incidence Small-Angle X-ray Scattering (GISAXS) experiments at high temperatures for isothermal studies. The furnace consists of two interconnected chambers: (i) a main chamber housing the heating elements, where the sample is inserted during GISAXS measurements, and (ii) a pre-chamber where the sample is maintained near room temperature until the temperature in the main chamber reaches the pre-selected value. The two-chamber design allows a rapid increase of the sample temperature and avoids the sample overheating, conditions desirable for studies of the formation and growth of nanoparticles under isothermal annealing. In a practical application, the furnace was used to investigate the kinetics of the formation of NiSi2 silicide nanocrystals endotaxially grown in Si(001) wafers. This experiment allowed us to gain insights into the growth process and evaluate the performance of the furnace for in situ GISAXS studies. The high-temperature furnace provides a robust tool for studying the effect of annealing temperature on the kinetics of the growth of nanoparticles in thermally activated processes with special advantages in studies in which isothermal conditions are required.
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