Abstract
Electrical insulation and adhesion are two vital aspects for the integrated thin film sensors with Ni-based superalloy substrates. In this paper, nanocrystalline yttria-stabilized zirconia/alumina (YSZ/Al2O3) composite film was fabricated on Ni-based superalloy substrate by reactive magnetron sputtering. The X-ray diffraction and scanning electron microscope results show that tetragonal zirconia (t-ZrO2) nanocrystalline is homogeneously dispersed in the amorphous Al2O3 matrix. The crystal size of the t-ZrO2 nanocrystalline is well maintained with the temperature up to 1000 °C. The resistivity of the film is about 108 Ω·cm at 1000 °C, which is three orders of magnitude higher than that of the pure Al2O3 film. Furthermore, this YSZ/Al2O3 film demonstrates superior toughness and adhesion with the Ni-based superalloy substrate even after undergoing high-temperature cycles. Finally, a S-type thin-film thermocouple was fabricated on the YSZ/Al2O3 film shows good stability, repeatability, and linearity in multiple thermal cycling tests up to 900 °C exceeded 48 h.
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