Abstract

We demonstrate a high-speed linear microelectromechanical systems (MEMS) phase modulator capable of random access scanning at 350kHz, so that any state can be accessed in 2.9μs from any other state. 670 scan lines with a .87deg field of view (FOV) are demonstrated in a Fourier regime, with a projected far-field response of 660 lines with an 18deg FOV after magnification.

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