High-speed determination of the thickness and spectral ellipsometry investigation of films produced by the thermal oxidation of InP and V x O y /InP structures

Abstract

Spectral ellipsometry was used to determine the thickness and optical properties of films produced by the thermal oxidation of InP and VxOy/InP structures. Comparison of the measured optical characteristics and thickness of nanofilms with high-speed ellipsometric analysis data indicates that the two methods should be used in the case of multicomponent films. Absorption in such films is shown to be due, among other factors, to the presence of unoxidized indium, which influences the optical properties of the film and the ellipsometric measurement results.