Abstract

The evolution of the surface morphology and composition during the thermal oxidation of InP in the presence of V2O5 nanoislands has been studied by scanning tunneling microscopy and Auger electron spectroscopy. The results demonstrate that the effect of the islands is strongest in the initial stage of the process and persists in later stages. Auger electron spectroscopy and kinetic data strongly suggest that the oxidation of InP in the presence of vanadium oxide nanoislands follows a catalytic mechanism.

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