Abstract
We demonstrated the high-speed laser chemical vapor deposition of orthorhombic NaTaO3 (o-NaTaO3) films. The orientation of the o-NaTaO3 films was changed from (101) to (112) to (001) plane as the increase of deposition temperature from 823 to 913K. o-NaTaO3 films had faceted surfaces and columnar cross sections. The deposition rates of o-NaTaO3 films were 48–120µmh−1, which are 192–6000 times higher than those offered by wet-chemical routes.
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