Abstract
(1 1 1)-oriented barium titanate (BaTiO3) thick films were prepared on Pt-coated Si substrates by laser chemical vapor deposition. The effects of deposition temperature on the orientation, microstructure, and dielectric response of the BaTiO3 films were investigated. BaTiO3 films exhibited a significant (1 1 1) orientation at deposition temperatures from 930 to 1010 K. With increasing deposition temperature from 875 to 1010 K, the surface microstructure changed from cauliflower-like to columnar structures with pyramidal caps. The permittivity of a (1 1 1)-oriented tetragonal BaTiO3 film prepared at 980 K was 1890 at room temperature and 2600 at the Curie temperature of the film (395 K).
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