High Resolution X-Ray Diffraction (HRXRD) Studies of the Initial Stages of PVT-Growth of 4H-SiC Crystals

Abstract

Defect formation during the early stages of physical vapor transport (PVT) growth of 4H-SiC was investigated using high resolution x-ray diffraction (HRXRD). Characteristic lattice bending behaviors were revealed in the nearby seed crystal regions of grown crystals. The lattice bending was localized in close proximity to the seed/grown crystal interface, and the (0001) basal planes bended convexly toward the growth direction, indicative of the insertion of extra-half planes pointing toward the growth direction during the initial stages of crystal growth. This paper discusses the possible mechanisms of the observed lattice bending and sheds light on the defect formation processes during PVT-growth of 4H-SiC single crystals.