Abstract

A high-resolution CCD X-ray camera based on YAG:Ce or LuAG:Ce thin scintillators is presented. High-resolution in low-energy X-ray radiation is proved with several objects. The spatial resolution achieved in the images is about 1 μm. The high-resolution imaging system is a combination of a high-sensitivity digital CCD camera and an optical system with a thin scintillator-imaging screen. The screen can consist of YAG:Ce or LuAG:Ce inorganic scintillator [J.A. Mares, Radiat. Meas. 38 (2004) 353]. These materials have the advantages of mechanical and chemical stability and non-hygroscopicity. The high-resolution imaging system can be used with different types of radiation (X-ray, electrons, UV, and VUV [M. Nikl, Meas. Sci. Technol. 17 (2006) R37]). The objects used for the imaging tests are grids and small animals with features of several microns in size. The resolution capabilities were tested using different types of CCD cameras and scintillation imaging screens.

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