Abstract
A high-resolution CCD X-ray camera based on YAG:Ce or LuAG:Ce thin scintillators is presented. The high resolution in low energy X-ray radiation is proved on several objects. The achieved spatial resolution of the images is better than 1 micron. The objects used for imaging are grids and small animals with parts of several microns in dimension. The high-resolution imaging system can be used for different types of ionizing radiation (X-Ray, electron, UV, and VUV) for non-destructive micro-radiography and synchrotron beam inspection.
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