Abstract
Micron-thick layers of (Cr1-xGax)2O3 solid solutions were grown by modified mist chemical vapor deposition (mist-CVD) with three different Ga concentrations. Scanning electron microscopy (SEM) and X-ray diffraction (XRD) methods were used to analyze the quality of the films. They showed good crystallinity, homogeneity and coalescence of the samples. Solid solution contents estimation was performed via applying Vegard’s law to XRD data and by its results the highest reached Cr:Ga ratio is approximately 1:1. Transmission spectra of solid solutions demonstrated blue-shift of the absorption edge with increase of the Ga contents. Optical bandgap increased from 3.06 eV for undoped Cr2O3 sample to 3.73 eV for the layer with the highest Ga concentration.
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