High efficiency silicon microring resonators driven by conducting oxide capacitors

Abstract

Silicon microring resonators play pivotal roles in future optical interconnect systems due to their ultra-compact sizes and low energy consumption. The typical silicon microring resonator is operated by the reversed p-n junction to achieve electro-optic (E-O) modulation, but it suffers from the relatively low E-O tuning efficiency. Transparent conducting oxides (TCOs) have attracted attention due to the dramatic change of their refractive indices owing to the strong plasma dispersion effect. This talk will provide an overview of our recent research progress in the heterogeneously integrated silicon microring resonator based on embedded metal-oxide-semiconductor capacitors using TCOs to enhance E-O tuning efficiency.