Electrically tunable silicon microring resonator array for on-chip wavelength division multiplexing

Abstract

Silicon microring resonator (Si-MRR) plays an essential role in the scalable wavelength division multiplexing (WDM) device due to its ultra-compact size and low energy consumption. Typically, the resonant wavelength of the Si-MRR is controlled via the thermal heater with high power dissipation. Recently, a tunable Si-MRR heterogeneously integrated with high mobility transparent conducting oxide (HMTCO)/hafnium oxide insulator/Si metal-oxide-semiconductor (MOS) capacitor has demonstrated an alternative method to electrically tune the working wavelength with negligible power consumption. This talk will demonstrate a WDM cascaded with four HMTCO gated MOS Si-MRRs and show the large wavelength tuning range with high power efficiency.