Abstract
Probe-forming systems with high demagnification (up to 900) based on a separated orthomorphic quadruplet of magnetic quadrupole lenses are considered. Spherical aberrations are corrected using an octupole lens system. Three, two, and one lens correctors are used. The calculation of the octupoles parameters was carried out using the Matrizant method. The focusing properties of the systems are determined by optimizing the process of probe formation based on the value of the maximum reduced collimated acceptance in the range of beam spot sizes on the target from 10 to 100 nm. The possibility of implementing the considered systems in experimental setups for various applications is demonstrated by the results of the numerical analysis performed.
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