Resolution limit of probe-forming systems with magnetic quadrupole lens triplets and quadruplets

Abstract

Over the past decade, in MeV ion beam microanalysis efforts to achieve a spatial resolution better than 0.1 μm with a beam current of ∼100 pA have been connected with microprobes of new generation where the probe is formed by means of separated magnetic quadrupole lens structures [1]. However, as was pointed out in [2], no dramatic improvements in spatial resolution have been produced so far. For better understanding of the situation the authors carried out theoretical studies of multiparameter sets of probe-forming systems based on separated triplets and quadruplets of magnetic quadrupole lenses. Comparisons were made between the highest current values attained at different systems for a given beam spot size. The maximum parasitic sextupole and octupole field components were found whose contributions to spot broadening are tolerable. It is shown that the use of modern electrostatic accelerators [3] and precision magnetic quadrupole lenses [4,5] makes it possible to eliminate the effect of chromatic aberrations and second- and third-order parasitic aberrations resulting from distortions of the quadrupole lens symmetry. Therefore probe-forming systems with triplets and quadruplets of magnetic quadrupole lenses have a lower theoretical spatial resolution limit which is restricted mainly by intrinsic spherical third-order aberrations in state-of-the-art microprobes.