High-current metal-ion beams with energies up to 45 keV u−1

Abstract

The high-current ion source CHORDIS † † Manufactured under GSI licence by Danyfysik A/S, Jyllinge, Denmark. is intended to generate d.c. and pulsed beams of at least milliampere intensities of any element. Beside gas and oven versions of this ion source a sputter version has been developed and investigated with aluminium, titanium, iron, copper, molybdenum and tantalum electrodes. Stable beams of these metals can be extracted from the source for several hours. The CHORDIS source is used at GSI at a 50 kV test bench and at the 300 kV test accelerator. At the second beam line of the test accelerator h radio frequency quadrupole postaccelerator has been installed which accelerates milliampere ion beams up to 45 keV u −1. Parameters of the different beam lines available at GSI for implantation experiments are summarized. With this equipment high-dose implantation of heavy ions to depths of about 1 μm is possible. Experiments by external research groups started in 1987.