Heterogeneous Integration of Autonomous Systems in Package for Wireless Sensor Networks

Abstract

The concept of Energy Harvester in Package (EHiP) is focused on the vertical heterogeneous integration of a MEMS die, dedicated to scavenge energy, with another auxiliary chip which includes the control and power management circuitry, sensors and RF capabilities. Based on this concept, we have developed and characterized several approaches for piezoelectric and electrostatic transductions to extract energy from the harmonic motion generated by a permanent magnet attached to the EHiP and placed in the surroundings of a cable of the power grid, i.e. an alternate electromagnetic field, in addition to the ambient mechanical vibrations.