Abstract

High-performance and very compact heat sinks have been developed for effective cooling of VLSIs with high heat-generation densities. Their heat transfer and pressure loss characteristics in air-jet cooling have been experimentally studied. The highly compact heat sinks were plate-fin arrays with a very small fin pitch of 0.4-2.0 mm. The rectangular jet nozzle width that gave the highest cooling performance was 30 to 40% of the streamwise length of the heat sinks. The influence of fin height on heat transfer became weak when the ratio of the height to the thickness of the fin exceeded approximately 35. When the air flow rate was constant, the thermal conductance increased as the fin pitch decreased. For a constant fin pitch, heat sinks with smaller fin thickness showed larger thermal conductance at a given blower power consumption. In our experimental range, the heat dissipation rate per unit heat sink volume increased as the base plate area of the heat sink became small.

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