Abstract
High compressive stresses usually observed in carbon films prepared by physical vapor deposition (PVD) method often form wrinkles in them. The change of the wrinkle pattern and the shape of its cross section were investigated by optical microscope. The moving rate of the peeling front in the wrinkle pattern was measured and analyzed on the assumption that the wrinkling is the activation process. The energy of the activation was considered to be supplied from the strain energy which is originally equivalent to the internal compressive stress in the film. It was found that in order to interpret the wrinkling of the carbon film, stress concentration at the peeling front is necessary and most of the stored strain energy is converted into the surface free energy of the film and the substrate surface. For the determination of the shape of the wrinkle cross section, buckling equation was solved and the shape is approximated by a part of a sinusoidal curve.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
