Abstract
Spatially ordered growth of InAs quantum dots (QD) was demonstrated via metalorganic vapour phase epitaxy on step-bunched vicinal GaAs substrates. Regular terraces of step-bunched surfaces were achieved by growing on GaAs (1 0 0) substrates off-oriented 2°, 4° and 6° towards the 〈1 1 0〉 and 〈1 1 1〉 directions, thus serving as in situ templates for the growth of the QD layer. Multilayer stacks of strain-aligned QDs were successfully grown to improve the size homogeneity and therefore optoelectronic properties. Furthermore, the possibility of fabricating laterally ordered quantum wires (QWR) in the same manner was shown.
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