Abstract
Silicon precipitates in surface layers as thin as 50 nm of quartz glass plates where 9.8 eV photons from an argon excimer laser are irradiated. The surfaces have many protrusions having a spherical shape with submicrometer diameter. Raman spectra indicates that they are made of crystalline silicon. Such a phenomenon has not been observed by 8.5 eV photons from a krypton excimer laser. VUV laser material processing offers a novel way to produce directly polycrystalline silicon circuits in thin surface layers of quartz glass plates.
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