Abstract

We deposited Ta2O5 thin films on the (001) surfaces of 80K-phase Bi-Sr-Ca-Cu-O(BSCCO) single crystals, and investigated the growth modes by reflection high energy electron diffraction (RHEED) and the interfaces between the BSCCO single crystal and the Ta2O5 film by X-ray photoelectron spectroscopy (XPS). When the 200A Ta2O5 thin films were deposited on the BSCCO single crystal surfaces at the substrate temperatures of room temperature and 300°C, the growth modes were amorphous form. From the XPS results, we found that Ta2O5 of the Ta2O5/BSCCO specimen diffused into the BSCCO substrate, and that the deteriorated layer was formed at the interface.

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