Abstract

Abstract The effects of substrate temperature, source temperature and separation distance between the source and substrate on the growth rate of CdZnTe (CZT) films by Closed Space Sublimation (CSS) were systematically investigated. A maximum deposition rate of above 5 μm/min was achieved with a source temperature of 650 °C. The CZT films were heat treated by CdCl2 vapour in CSS system. The CdCl2 treatment on the structural and optical properties of CZT films was studied.

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