Abstract

We have investigated the molecular beam epitaxial growth of CdTe on (001)-oriented CdTe substrates. Reflection high energy electron diffraction (RHEED) oscillations were observed to measure the growth and desorption rate as a function of flux and temperature. Based on these results a model was developed which describes the decrease of growth rate with increasing substrate temperature taking into account the desorption from a physisorbed and a chemisorbed state. The desorption energy of the chemisorbed and also of the physisorbed state was calculated.

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